Cov txheej txheem ntau lawm: hlais tawm, ntxuav, npaj suede, peripheral etching, hnub ci vaj huam sib luag tshem tawm sab nraum qab PN + kev sib tshuam, ua cov hluav taws xob sab saud thiab qis, ua cov yeeb yaj kiab los tiv thaiv, ua txhaum, kuaj thiab ntsuas, hnub ci vaj huam sib luag thiab lwm yam 10 kauj ruam Cov. Cov kev tsim khoom tshwj xeeb txheej txheem ntawm lub hnub ci hlwb. Daim hlais: Siv cov kab ntau txoj kab txiav, hnub ci vaj huam sib luag lub silicon pas nrig txiav rau hauv cov square silicon wafers. Kev ntxuav kom huv: Siv cov txheej txheem yooj yim silicon wafer kev ntxuav kom huv, hnub ci vaj huam sib luag thiab tom qab ntawd siv cov kua qaub (lossis alkali) daws kom tshem tawm 30-50um los ntawm kev txiav kev puas tsuaj nyob rau saum npoo ntawm silicon wafer. Kev npaj suede: anisotropically etch lub silicon wafer nrog alkali tov los npaj suede nyob rau sab ntawm silicon wafer. Phosphorus diffusion: Cov khoom siv los (los yog cov khoom siv ua kua, hnub ci vaj huam sib luag lossis phosphorous nitride sheet source) yog siv rau kev sib sau los ua PN + kev sib tshuam. Qhov kev sib tshuam qhov tob yog feem ntau 0.3-0.5um.
Peripheral etching: Cov txheej txheem diffusion tsim nyob rau qhov chaw sab ntawm lub silicon wafer thaum diffusion yuav luv luv-Circuit Court sab saud thiab sab hluav taws xob ntawm lub roj teeb. Lub peripheral diffusion txheej raug tshem tawm los ntawm masked ntub dej etching lossis ntshav ntshav etching. Tshem lub nraub qaum PN + hlws ris. Feem ntau siv txoj kev ntub dej etching los yog kev sib tsoo kom tshem tawm sab nraub qaum PN + kev sib tshuam. Ua hluav taws xob sab saud thiab qis: siv cov tshuab nqus, lub hnub ci vaj huam sib luag electroless nickel plating lossis aluminium paste luam ntawv thiab cov txheej txheem sintering. Ua ntej ua rau hauv qab electrode, hnub ci vaj huam sib luag ces ua rau cov hluav taws xob sab saum toj. Aluminium muab tshuaj luam ntawv yog cov txheej txheem dav siv txoj kev.
Fabrication ntawm cov yeeb yaj kiab los tiv thaiv kev tiv thaiv: Txhawm rau kom txo qhov xwm txheej poob siab ploj, hnub ci vaj huam sib luag txheej txheej ntawm txheej txheej los tiv thaiv kev xav yuav tsum tau them rau sab saum npoo ntawm silicon wafer. Cov ntaub ntawv siv los ua cov yeeb yaj kiab tiv thaiv kev tiv thaiv muaj xws li MgF2, SiO2, Al2O3, SiO, Si3N4, TiO2, Ta2O5, hnub ci vaj huam sib luag thiab lwm yam txheej txheem txheej txheem tuaj yeem yog nqus txheej txheej, ion txheej txheej, txheej txheem sib cais, hnub ci vaj huam sib luag luam ntawv txheej txheem, PECVD txoj kev los yog txau txheej txheem, thiab lwm yam. Sintering: Sintering lub roj teeb nti ntawm cov npib tsib xee lossis tooj liab. Kuaj kev faib tawm: Raws li cov kev txwv tshwj xeeb kev ntsuas qhov tseeb, tso tawm cov hnub ci vaj huam sib luag.